
A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber
Semiconductor Manufacturing | Semiconductor Dry Etching | Smart Manufacturing

A Novel Quality Clustering Methodology on Fab-wide Wafer Map Images in Semiconductor Manufacturing
Semiconductor Manufacturing | Wafer Map | Smart Manufacturing | Dynamic Clustering | Rotation-Invariant Feature Extraction

Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks
Semiconductor Manufacturing | Quality Control | Smart Manufacturing | Chemical Mechanical Polishing